Fluid handling – With heating or cooling of the system
Reexamination Certificate
1999-06-07
2001-03-27
Rivell, John (Department: 3753)
Fluid handling
With heating or cooling of the system
C251S248000, C251S161000, C251S129110, C251S056000, C392S474000
Reexamination Certificate
active
06206029
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to the valve of a vacuum apparatus which is provided between both left and right vacuum chambers which open and close an opening therebetween.
2. Description of the Related Art
Generally, the valve of a vacuum apparatus which is used for producing semiconductors, etc., to open and close vacuum chambers is shown in FIG.
1
. In between right and left vacuum chambers
80
and
81
, a valve V
0
is provided vertically. This valve V
0
has a casing C, in which a valve body
86
is accommodated movably in its upper and lower directions. The valve body
86
is formed in a plate-like shape and fixed at the upper end of a valve shaft
84
.
The valve shaft
84
slides in a seal S
0
and a bellows
85
is formed between the seal S
0
and the upper end of the valve shaft
84
to maintain a vacuum state in the casing C while the valve shaft
84
slides. A driving section (not shown) is formed under the valve shaft
84
so that the valve body
86
moves up and down to open and close the communicating aperture
82
of the casing C.
However, in the valve V
0
of the vacuum apparatus, since the bellows
85
which is placed inside a communicating space S
1
of both vacuum chambers
80
and
81
is expanded and shrunken in a vacuum situation, life span of the bellows
85
is short and harmful particles are generated. Moreover, a plate type of valve body is used in the valve V
0
, and therefore it can only seal one side of the vacuum chamber
80
. Furthermore, there is a problem that the working space is limited to make difficult maintenance work for the driving section because the valve V
0
is fitted vertically in between the two vacuum chambers
80
and
81
with the driving section being positioned under the two chambers.
SUMMARY OF THE INVENTION
An object of the present invention is therefore to provide a valve of a vacuum apparatus which has seal parts o n its bo th sides without a bellows in which fewer particles are generated to ensure a long life-span and which facilitates maintenance work for the valve, especially the driving section thereof.
This and other objects can be achieved according to the present invention by providing a valve of a vacuum apparatus as disclosed hereinafter.
A valve of a vacuum apparatus provided between left and right vacuum chambers for opening and closing chamber openings thereof, comprises:
a valve seat body disposed between said left and right chambers and having left and right communicating openings communicating with said chamber openings;
a valve body arranged in said valve seat body so as to rotate around its center axis and to move in an axial direction of said valve seat body in order to open and close said communicating openings by adjusting its rotary position; and
a driving section for moving said valve body in an axial direction of said valve seat body and for rotating it around its center axis.
In order to attain the aforementioned objects, the valve is fitted between two left and right vacuum chambers. The valve of the vacuum apparatus is provided in a valve seat body having a valve path which communicates with the chamber openings of the vacuum chambers. Also, the valve has a valve body which rotates freely inside the valve seat body along its center axis, and moves in the axial direction of the valve seat body so as to open and close the communicating openings by controlling the position of rotation of the valve body. Furthermore, a driving section for moving the valve body in the axial direction thereof and for rotating it around its center axis is also formed in the valve.
The above-mentioned structure of the valve of a vacuum apparatus may make it possible to open and close freely the openings of left and right vacuum chambers. This structure will lessen harmful particles to ensure a longer life span. Also, if the valve is fitted horizontally between left and right chambers, maintenance work will become remarkably easier.
The nature and further features of the present invention will be made clear from the following descriptions made with reference to the accompanying drawings.
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McShane Thomas L.
Rivell John
Shinkuseiko Co., Ltd.
Young & Thompson
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