Valve mechanism for a vacuum valve

Valves and valve actuation – With means to increase head and seat contact pressure – With positive reduction

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251193, F16K 3144

Patent

active

057554269

ABSTRACT:
A valve mechanism for a vacuum sliding valve. The mechanism includes a valve housing defining a vacuum chamber having a throughgoing opening therein and being free from setting elements which move relative to one another; a drive region disposed adjacent to and outside of the vacuum chamber; and a sealing interface disposed between the vacuum chamber and the drive region for sealing the vacuum chamber and the drive region with respect to one another. The mechanism further includes a valve disk disposed in the vacuum chamber, and a drive connected to the valve disk and disposed in the drive region for moving the valve disk for sealingly closing the throughgoing opening with the valve disk. A rod of the mechanism has a first end disposed in the vacuum chamber and a second end disposed in the drive region, and is connected to the valve disk at the first end thereof and sealingly extends through the sealing interface and out of the vacuum chamber. The rod further engages with the drive at the second end thereof, the drive thus positively controlling an actuation of the rod from a region outside of the vacuum chamber. The mechanism further includes a tilting bearing disposed at the sealing interface and configured such that the rod tilts about the tilting bearing and moves translationally through the tilting bearing for sealingly closing the throughgoing opening with the valve disk responsive to an actuation of the rod by the drive.

REFERENCES:
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patent: 3442295 (1969-05-01), Ver Nooy
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patent: 5108073 (1992-04-01), Adachi
patent: 5120019 (1992-06-01), Davis, Jr.
patent: 5626324 (1997-05-01), Nakamura et al.
patent: 5641149 (1997-06-01), Ito

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