Valve for vacuum exhaustion system

Details Valve for vacuum exhaustion system Valve for vacuum exhaustion system

2011-08-02

2011-08-02

Fristoe, Jr., John K (Department: 3753)

Valves and valve actuation

Reciprocating valve

Diaphragm

C251S368000

Reexamination Certificate

active

07988130

ABSTRACT:
The invention provides a valve and a method of operating the valve that makes it possible to reduce the diameter of the vacuum exhaustion pipings to make the facility for the vacuum exhaustion system small, which results in lower costs and shortens vacuum exhaustion time, and also which can prevent corrosion, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of gas flowing through the pipings. In particular, in accordance with the present invention, an aluminum passivation is applied on the piping parts, i.e. the valve and others, that are used in the vacuum exhaustion system so as to inhibit gas decomposition caused by temperature rise at the time of baking so that components for reduction in the diameter size in the vacuum exhaustion system are provided. Thus, corrosion, cloggings and seat leakages caused by gas decomposition are prevented.

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International Search Report issued in the corresponding application PCT/JP2004/001352 completed Mar. 25, 2004 and mailed Apr. 6, 2004.

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