Valve device

Details Valve device Valve device

2007-06-12

2007-06-12

Doerrler, William C. (Department: 3744)

Refrigeration

Low pressure cold trap process and apparatus

Reexamination Certificate

active

10916698

ABSTRACT:
A valve device, according to the invention, for connecting to a cryopump, wherein the valve device comprises a body with a through-channel and a connection flange at one end of the through-channel for connecting to a backing pump connection flange of the cryopump; a pressure relief valve which opens when an overpressure in the through-channel exceeds a limiting valve and which lets this overpressure out of the through-channel; a purge gas line in which a purge gas valve is arranged and which serves to supply a purge gas to a supply line of the cryopump during a regeneration process of the cryopump; wherein an end portion of the purge gas line by which the purge gas line can be connected to the supply line of the cryopump runs within the through-channel to the area of the end of the through-channel situated in the connection flange. A pump arrangement according to the invention is also disclosed.

REFERENCES:
patent: 4718240 (1988-01-01), Andeen et al.
patent: 5862671 (1999-01-01), Lessard et al.
patent: 5906102 (1999-05-01), Bartlett et al.
patent: 6327863 (2001-12-01), Yamartino et al.
patent: 2005/0204753 (2005-09-01), Bartlett et al.

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