Fluid handling – Systems – Dividing into parallel flow paths with recombining
Reexamination Certificate
2007-10-09
2007-10-09
Hepperle, Stephen M. (Department: 3753)
Fluid handling
Systems
Dividing into parallel flow paths with recombining
C251S117000, C251S172000, C251S192000, C251S251000, C251S301000
Reexamination Certificate
active
11063075
ABSTRACT:
A valve assembly including a housing having a flow path extending to an outlet and a valve seat in the flow path and around the outlet, a slide plate located in the housing and movable transversely to a longitudinal axis of the flow path between a closed position, in which the slide plate is in contact with the valve seat and blocks flow through the flow path, and an opened position, in which the slide plate allows flow through the flow path, and wherein at least one of the slide plate and the valve seat includes at least one passageway for providing a predetermined amount of conductance between the slide plate and the valve seat when the slide plate is in the closed position.
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Lucas Paul D.
Pisera Jaroslaw W.
Hepperle Stephen M.
McDermott Will & Emery LLP
MKS Instruments Inc.
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