Vacuum vapor deposition system

Coating apparatus – Gas or vapor deposition – Running length work

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Details

118725, 118726, 118730, C23C 1310

Patent

active

045520925

ABSTRACT:
A vacuum vapor deposition system including a high-vacuum vapor deposition chamber provided with a rotary cell around which band steel is wound as it is passed through the chamber. A crucible for molten metal has a hood for guiding vapor of said metal to a vapor deposition port opposed to the rotary cell, and arcuate covers connected to the hood at the entrance and exit positions of the band steel. The vapor deposition port is spaced slightly from the rotary cell so that the covers will not come into contact with the band steel. A heater is provided for heating the surface of the rotary cell up to a temperature equal to or higher than a reevaporation temperature of the metal under a vapor pressure of the vapor of the metal in the proximity of the rotary cell so that the metal will not be deposited onto the opposite end portions of the rotary cell which are not covered by the band steel. A heater is also provided for heating the surfaces of the hood and the covers up to a temperature equal to or higher than such reevaporation temperature of the metal so that metal will not be deposited onto the hood and the covers.

REFERENCES:
patent: 2793609 (1957-05-01), Shen et al.
patent: 2925062 (1960-02-01), Schwidt
patent: 3176356 (1965-04-01), Jenkin
patent: 3198167 (1965-08-01), Bakish
patent: 3460976 (1966-08-01), Allen
patent: 3488617 (1970-01-01), Dietrich et al.

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