Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent
1983-11-22
1985-12-31
Metz, Andrew H.
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
118726, 204298, 219121EE, 219121EF, C23C 1430
Patent
active
045613826
ABSTRACT:
A vapor deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, a hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.
REFERENCES:
patent: 3267015 (1966-08-01), Morley
patent: 3562141 (1971-02-01), Morley
J. Luce, "Intense Gaseous Discharges", Proceedings of Second U.N. Conference on Peaceful Uses of Atomic Energy, (1958) 31, pp. 305-314.
L. M. Lidsky et al., "Highly Ionized Hollow Cathode Discharge", Journal of Applied Physics, vol. 33, No. 8, Aug. 1962, pp. 2490-2497.
J. R. Morley, "The Hollow Cathode Discharge", Proceedings of the Fifth Annual Meeting of the Electron Beam Symposium, Mar. 28, 1963, p. 368-377.
C. T. Wan et al., "Investigation of Hot-Filament and Hollow-Cathode Electron-Beam Techniques for Ion Plating", Journal of Vac. Sci. and Technol., vol. 8, No. 6, Nov./Dec. 1971, pp. 99-104.
D. G. Williams, "Vacuum Coating with a Hollow Cathode Source", Journal of Vac. Sci. and Technol., vol. 11, No. 1, Jan./Feb. 1974, pp. 374-376.
G. Mah, "PVD by Electron Beam Processes", Plating and Surface Finishing, 1983.
Hightower Judson R.
Leader William T.
Libman George H.
Metz Andrew H.
Sopp Albert
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