Vacuum ultraviolet light source

Details Vacuum ultraviolet light source Vacuum ultraviolet light source

1991-06-21

1993-02-09

O'Shea, Sandra L.

Electric lamp and discharge devices

Fluent material supply or flow directing means

Arc discharge lamp or radiation source

31323161, 31511131, 2504931, 250 504R, H01J 724, H01J 3726

Patent

active

051855526

ABSTRACT:
A vacuum ultraviolet light source for generating a pulse discharge in a low pressure gas and extracting ultraviolet light from a plasma created in that discharge, is disclosed which comprises a discharge space P, a plate-like anode located in the discharge space, a plurality of hollow cathodes located in the discharge space in an opposed, spaced-apart relation to the anode, auxiliary electrodes provided in an inside space of the hollow cathode in a state shielded from the hollow cathode, means which, while maintaining a pressure in the discharge space constant, flows a gas along a route in the discharge space after passing through an inner space in each hollow cathode, a power supply for supplying an electric power for generating a main discharge across the hollow cathode and the anode after a pre-discharge is produced across each hollow cathode and the anode, and ultraviolet extracting means for extracting ultraviolet light radiated from a plasma which is produced by a discharge in the discharge space.

REFERENCES:
patent: 3942018 (1976-03-01), Simpson
patent: 4525381 (1985-06-01), Tanaka et al.
patent: 4707637 (1987-11-01), Harvey
Soviet Inventions Illustrated, El Section, Week 8637, Oct. 22, 1986, Derwent Publications Ltd., London, GB, S03, p. 22.
Rev. Sci. Instrum. 56(5) pp. 759-761 (1985); J. E. Rowe, S. B. Christman, and E. E. Chaban.
Appl. Phys. Letter 57(18), pp. 1873-1875 (1990); Z. Yu, T. Y. Sheng, Z. Luo, and G. J. Collins.
Appl. Phys. B46, pp. 299-303 (1988); B. Eliasson and U. Kogelschatz.

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