Vacuum-type article holder and methods of supportively retaining

Details Vacuum-type article holder and methods of supportively retaining Vacuum-type article holder and methods of supportively retaining

1983-04-28

1984-01-31

Edmundson, F.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

248362, 269 21, C25B 902, A45D 4214, B60G 1132

Patent

active

044288158

ABSTRACT:
A vacuum-type holder (10) for retaining fragile articles such as semiconductor wafers (16) during a manufacturing operation, such as an electrolytic treatment includes a vacuum-operated support (36) at each of the seats (23) which exerts a supporting force against the underside (32) of the wafer (16) which is opposite to and proportional to a vacuum generated holding force which urges the wafer against the seat. The supporting force, consequently, minimizes bending stresses to which the wafer (16) could otherwise be subjected.

REFERENCES:
patent: 3481858 (1969-12-01), Fromson
patent: 3536594 (1970-10-01), Pritchard
patent: 3558093 (1971-01-01), Bok
patent: 4043894 (1977-08-01), Gibbs
patent: 4213698 (1980-07-01), Firtion et al.

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