Vacuum treatment apparatus comprising annular treatment chamber

Details Vacuum treatment apparatus comprising annular treatment chamber Vacuum treatment apparatus comprising annular treatment chamber

1992-12-28

1994-12-06

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118729, 118730, 156345, 20429828, C23C 1650

Patent

active

053707370

ABSTRACT:
A vacuum treatment apparatus for workpieces includes an annular treatment chamber having inner and outer surrounding walls and top and bottom walls. A carrier for a multitude of workpieces is provided. The carrier is arranged in a carousel-like manner in the annular treatment chamber. A drive mechanism linked to the carrier, drives the carrier. At least one part of at least one of the walls may be opened to open the annular treatment chamber for charging and discharging. The at least one part is of such an extent so as to allow charging and discharging with a plurality of the multitude of workpieces simultaneously.

REFERENCES:
patent: 3856654 (1974-12-01), George
patent: 3892198 (1975-07-01), Dobson
patent: 4849250 (1989-07-01), Dee et al.
patent: 4938858 (1990-07-01), Zejda
patent: 5026469 (1991-07-01), Kunkel et al.

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