Vacuum-treatment apparatus

Details Vacuum-treatment apparatus Vacuum-treatment apparatus

1992-02-14

1993-04-20

Nguyen, Nam X.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429823, 156345, 118503, C23C 1434

Patent

active

052039811

ABSTRACT:
A vacuum-treatment apparatus employs a magnetically driven clamp which uses repulsive and attractive forces between magnets. The clamp mechanism is simplified, maintenance of the apparatus can be easily performed, and the surfaces which mechanically contact one another are decreased as much as possible so that a vacuum-treatment apparatus which generates less dust is obtained.

REFERENCES:
patent: 4473455 (1984-09-01), Dean et al.
patent: 4522697 (1985-06-01), Dimock et al.
patent: 4535834 (1985-08-01), Turner
patent: 4869801 (1989-09-01), Helms et al.
patent: 4944860 (1990-07-01), Bramhall, Jr. et al.
patent: 5006536 (1992-03-01), Cathey, Jr.
patent: 5037262 (1991-08-01), Moll et al.

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