Vacuum-tight signal lines in a testing apparatus for components

Details Vacuum-tight signal lines in a testing apparatus for components Vacuum-tight signal lines in a testing apparatus for components

1991-12-30

1993-06-01

Nguyen, Vinh

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 731, 324158R, G01R 3126

Patent

active

052163601

ABSTRACT:
A testing apparatus for components which are tested using an electric or an ion beam in a vacuum chamber overcomes seal problems by providing electrical connection to the component to be tested through a multilayer printed circuit board. The multilayer printed circuit board may be connected to a needle adapter within the vacuum chamber for providing the electrical connection to the component.

REFERENCES:
patent: 4864228 (1989-09-01), Richardson
patent: 4875004 (1989-10-01), Boyd
patent: 4881591 (1989-11-01), Rignall
patent: 5039938 (1991-08-01), Kohnen et al.
patent: 5041783 (1991-08-01), Ohta et al.

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