Vacuum system with molecular flow line

Details Vacuum system with molecular flow line Vacuum system with molecular flow line

1988-08-10

1989-08-29

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

62100, 62268, 55269, 417901, B01D 800

Patent

active

048605468

ABSTRACT:
In a vacuum system having a load lock cooperating with a work chamber, a flow line is connected between the cryopump of the load lock and the work chamber. The flow line passes noncondensible gases which are not absorbed by the cryopump of the load lock to the work chamber 12 for absorption by the cryopump of the work chamber. Alternatively, the flow line is connected between the load lock cryopump and the cryopump of the work chamber for directly passing the noncondensible gases to the work chamber cryopump. The flow line prevents buildup of noncondensible gases within the cryopump of the load lock. The flow line may include baffles to damp pressure surges during cryopumping of the load lock. A control valve connected to the flow line allows operator control of the passing of noncondensible gases from the load lock cryopump to the work chamber or to the work chamber cryopump through the flow line. The dimensions of the flow line provide molecular flow of the noncondensible gases.

REFERENCES:
patent: 3485054 (1969-12-01), Hogan
patent: 3536418 (1970-10-01), Breaux
patent: 4446702 (1984-05-01), Peterson et al.
patent: 4464905 (1984-08-01), Dittrich et al.
patent: 4479927 (1984-10-01), Gelernt
patent: 4488507 (1984-12-01), Heinecke et al.
patent: 4577465 (1986-03-01), Olsen et al.

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