Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2007-02-13
2007-02-13
Morgan, Eileen P. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S008000, C451S009000, C451S041000, C451S289000, C451S494000
Reexamination Certificate
active
11252615
ABSTRACT:
The vacuum suction holding apparatus of the present invention has a vacuum duct which is disposed inside a polishing head, with one end of this vacuum duct being opened in the attachment surface and the other end thereof being connected to a vacuum source. A polishing body is held by suction on the attachment surface of the polishing head by sucking air through the vacuum duct. The apparatus further has an orifice which is disposed in the vacuum duct, a first pressure sensor and a second pressure sensor which detect the pressure inside the vacuum duct at positions before and after the orifice, and a judgment device which judges whether or not the polishing body is held by suction on the polishing head on the basis of the pressure difference before and after the orifice detected by these two pressure sensors.
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Arai Hiroshi
Izumi Shigeto
Morgan Eileen P.
Morgan & Lewis & Bockius, LLP
Nikon Corporation
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