Vacuum suction head

Details Vacuum suction head Vacuum suction head

2004-01-28

2010-06-01

Chin, Paul T (Department: 3652)

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

Reexamination Certificate

active

07726715

ABSTRACT:
An etchable plate-shaped material is used as a vacuum suction pad31. On one surface thereof, a large number of independent protruded portions and recessed portions are formed to provide a suction part33b. Further, a periphery of the suction part is annularly formed to provide an airtight part33a. When the vacuum suction pad31comes close to a substrate to be sucked, a skirt pad32with a slit32dis integrally formed in the shape of a hemmed hat using an elastic member, in order to block outside air into a peripheral space of the vacuum suction pad31. With this arrangement, it is possible to prevent the substrate from being locally deformed when the substrate is sucked by discharging air from a suction port36and to widen a clearance between the vacuum suction pad and the substrate such as a liquid crystal panel, at which the suction is possible.

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