Vacuum slice carrier

Details Vacuum slice carrier Vacuum slice carrier

1987-09-04

1990-07-24

Ryan, Patrick

Stock material or miscellaneous articles

Hollow or container type article

Nonself-supporting tubular film or bag

111 50, 111 501, 111500, 111719, 118724, 118729, 118730, 118733, 414220, 414221, 414222, 414225, 414416, 414417, 427294, 427295, B32B 300, B65D 1742

Patent

active

049434578

ABSTRACT:
A vacuum-tight wafer carrier. The wafers are supported at each side by a slightly sloping shelf, so that minimal contact (line contact) is made between the wafer surface and the surface of the shelf. This reduces generation of particulates by abrasion of the surface of the wafer. The door of the vacuum carrier contains elastic elements to press the wafers lightly against the back of the carrier box. Thus, when the door of the box is closed, the wafers are restrained from rattling around, which further reduces the internal generation of particulates.

REFERENCES:
patent: 3874525 (1975-04-01), Hassan et al.
patent: 3902615 (1975-09-01), Levy et al.
patent: 3968885 (1976-07-01), Hassan et al.
patent: 4091919 (1978-05-01), MacLeod et al.
patent: 4339039 (1982-07-01), Mykleby
patent: 4436474 (1914-03-01), Grossman et al.
patent: 4449885 (1914-05-01), Hertel et al.
patent: 4520925 (1985-06-01), Johnson
patent: 4544318 (1985-10-01), Nagatomo et al.
patent: 4555024 (1985-11-01), Voss et al.
patent: 4574950 (1986-03-01), Koe et al.
patent: 4582191 (1986-04-01), Weigand
patent: 4588086 (1986-05-01), Coe

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