Seal for a joint or juncture – Seal between relatively movable parts – Relatively rotatable radially extending sealing face member
Patent
1996-07-01
1997-12-23
Cummings, Scott
Seal for a joint or juncture
Seal between relatively movable parts
Relatively rotatable radially extending sealing face member
277171, 277207A, 277236, 2853322, 285336, F16J 1508
Patent
active
057000140
DESCRIPTION:
BRIEF SUMMARY
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention is related to a vacuum sealing structure which maintains a state of vacuum as against the atmosphere, and more particularly, is related to a vacuum sealing structure which is useful for connecting a vacuum chamber with other members or for connecting pipes with each other while maintaining a state of vacuum.
2. Description of the Prior Art
Conventionally, parts such as a monitoring window (viewing port) are vacuum sealed and mounted via a flange on vacuum equipment, such as vacuum evaporation equipment, sputtering devices, plasma generators and high vacuum experiment equipment.
FIG. 11 is a cross-sectional view showing how a conventional viewing port 41' is mounted. In the figure, reference numeral 13 denotes a pipe coupled with a vacuum sealing structure. The lower end of the pipe is welded to a vacuum chamber not shown, and the upper end of the pipe is welded to a projection protruding from an inner circumference of a knife edge type flange 11 on the body side, which is part of the vacuum sealing structure (13a shows the weld). On the upper surface of the flange 11 on the body side there is formed a knife edge 11d.
The viewing port 41' is, on the other hand, formed by welding a knife edge type outer flange 23 to a kovar cylinder 71 (73 shows the weld). The cylinder 71 is sealed with a glass sheet 45 (47 shows the seal). The inside of the vacuum chamber may be observed through the glass sheet 45. The viewing port 41' is produced when a metallic gasket 33 is pinched between and pressed tight by the outer flange 23 and the flange 11 to the extent that a knife edge 11d comes into the metallic gasket 33. As seen from above, vacuum sealing is achieved by making use of flanges and a gasket based sealing structure and sealing parts, different in kind or different in material, on the outer flange 23.
FIG. 12 is a cross-sectional view showing a conventional way of coupling pipes with each other while maintaining a state of vacuum. Reference numerals 13' and 71' in FIG. 12 denote pipes connected to the vacuum sealing structure, the ends of the pipes are welded to the flanges 23 and 23'. At the edge of each of the flanges 23 and 23' there are formed a knife edge 23d and a knife edge 23d' respectively, both being part of the vacuum sealing structure. The metallic gasket 33' is pinched between and pressed tight by the flanges 23 and 23', so that the knife edges 23d and 23d' come into the metallic gasket 33' to provide a vacuum seal. The above-mentioned sealing structure needs, however, welding or sealing, which might increase the costs of replacement of any of the parts. In addition, if the glass sheet 45, for example, is damaged after sealing the vacuum equipment, it will be necessary to replace the viewing port 41' itself consisting of the outer flange 23, the cylinder 71 welded to the flange 2, the glass sheet 45 sealed with the cylinder 71, or the cylinder 71 and the flange 23 altogether, which would increase maintenance expenses.
SUMMARY OF THE INVENTION
Accordingly, it is an object of the present invention to provide a sealing structure in which it is easy to manufacture, maintain and replace vacuum parts without welding a pipe vacuum sealed to a flange.
The present invention is related to a vacuum sealing structure which connects first connection parts with a second connection part via a gasket. At least one of the first or the second connection parts is provided with a jaw consisting of one end broadened outwardly of a pipe member forming a vacuum passage, and support members which are independent of the pipe member and have an annular tapered groove.
The jaw is located at one surface in direct contact with the gasket and at the other surface in contact with the tapered groove, and the supporting member is fastened with a fastening member which presses tight the tapered jaw against the gasket, thus forming the vacuum sealing structure. Further, the supporting member may be divided into 2 or more parts, and it is preferable that the
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VCR Product Catalog, Cajon Company, three pages, Apr. 1990.
Morita Shinsaku
Sato Yoshiyuki
Cummings Scott
Japan Vac's Metal Co., Ltd.
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