Vacuum regulating valve

Details Vacuum regulating valve Vacuum regulating valve

2007-01-16

2007-01-16

Hepperle, Stephen M. (Department: 3753)

Fluid handling

Systems

Dividing into parallel flow paths with recombining

C251S063600, C251S285000

Reexamination Certificate

active

10890468

ABSTRACT:
A vacuum regulating valve which is simplified in structure and where the flow rate characteristic in evacuating a vacuum vessel is improved, comprises (i) a main valve1A of a large size which has: a principal body4having two main ports11, 12connected to a vacuum vessel7and a vacuum pump8, respectively, a valve seat14disposed in a fluid passage connecting the ports11, 12, a valve element15seated on and separated from the valve seat14, and a shaft20extending from the valve element15; and a valve element operating unit5for operating the valve element15via the shaft20, and (ii) a sub valve2A of a small size similar in structure to the main valve1A. The sub valve2A is attached to an outer side surface of a casing10of the main valve1A.

REFERENCES:
patent: 3426793 (1969-02-01), Klemm et al.
patent: 3477466 (1969-11-01), Sturm
patent: 5289811 (1994-03-01), Covert et al.
patent: 5848608 (1998-12-01), Ishigaki
patent: 6494229 (2002-12-01), Kajitani
patent: 6814338 (2004-11-01), Kajitani
patent: 2001-263532 (2001-09-01), None

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