Vacuum pumps with improved pumping channel configurations

Details Vacuum pumps with improved pumping channel configurations Vacuum pumps with improved pumping channel configurations

2006-08-31

2009-12-08

Kershteyn, Igor (Department: 3745)

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

C415S055100, C415S055400, C415S055600

Reexamination Certificate

active

07628577

ABSTRACT:
A vacuum pump includes a housing having an inlet port and an exhaust port, at least one molecular drag stage within the housing, the molecular drag stage including a rotor and a stator that defines a tangential flow channel which opens onto a surface of the rotor, and a motor that rotates the rotor so that gas is pumped from the inlet port to the exhaust port. The stator defines one or more obstructions in the channel. The obstructions alter gas flow through the channel and produce turbulence under viscous or partially viscous flow conditions.

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PCT/US2007/019059, PCT International Search Report, mailed Jan. 3, 2008, 5 pages.

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