Vacuum pumps with claw-type rotor and roots-type rotor near the

Rotary expansible chamber devices – Diverse rotary expansible chamber devices

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418 9, F04C 1818, F04C 2502

Patent

active

058460667

ABSTRACT:
A mechanical vacuum pump having mounted in each of at least three pumping chambers a pair of intermeshing rotors. A first rotor of each pair being mounted for rotation on a first shaft passing through the chambers and a second rotor of each pair being mounted for rotation on a second shaft passing through the chambers. The first and second shafts are driven in contra-rotating directions to effect a sequential pumping action by the pairs of rotors in each chamber in respect of gas being pumped between a pump inlet and a pump outlet. The pump possesses at least one chamber with claw-type profile rotors and one ore more chambers with roots-type profile rotors. The chamber nearest the pump outlet has a rotor with a roots-type profile.

REFERENCES:
patent: Re25567 (1964-05-01), Lorenz
patent: 4934908 (1990-06-01), Turrell et al.
patent: 4940398 (1990-07-01), Berges et al.
patent: 4983107 (1991-01-01), Steffens et al.
patent: 4995796 (1991-02-01), Kambe et al.
Wycliffe, H., "Mechanical high-vacuum pumps with an oil-free swept volume," J. Vac. Sci. Technol. A5(4), Jul./Aug. 1987, pp. 2608-2611.

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