Rotary expansible chamber devices – Interengaging rotating members – Each tapered
Reexamination Certificate
1999-06-16
2001-03-13
Denion, Thomas (Department: 3748)
Rotary expansible chamber devices
Interengaging rotating members
Each tapered
Reexamination Certificate
active
06200116
ABSTRACT:
BACKGROUND OF THE INVENTION
This invention relates to oil free (dry) vacuum pumps and, more particularly to such pumps having a screw rotor mechanism.
A screw pump comprising two externally threaded or vaned rotors mounted in a pump body and adapted for counter-rotation in the body with intermeshing of the rotor threads is well known. Close tolerances between the rotor threads at the points of intermeshing and with the internal surfaces of the pump body causes volumes of gas being pumped between an inlet and an outlet to be trapped between the threads of the rotors and the internal surface of the pump body and thereby urged through the pump as the rotors rotate.
Such screw pumps are potentially attractive because they can be manufactured with few working components and they have an ability to pump from a high vacuum environment at the pump inlet down to atmospheric pressure at the pump outlet.
Screw pumps are generally designed with each screw rotor being of cylindrical form overall, with the screw thread tip cross section being substantially constant along the length of the rotor. This has a disadvantage in vacuum pumps in particular that no volumetric compression is generated in use of the pump along the length of the rotor, thereby detrimentally affecting the pump's power consumption.
Screw vacuum pump s are commonly used in the semiconductor industry and, as such, need to be capable of maintaining a clean environment associated with semiconductor device processing, especially in that area of the pump—the pump inlet—closest to the semiconductor processing chamber to which the pump is attached.
A disadvantage associated with screw pumps in general is that the relatively long screw rotor length of vacuum pumps is that they need to have their rotor shafts held in bearing at each end of the shaft, i.e. including the end associated with the pump inlet. As such, the lubricants necessarily associated with these bearings may tend to leak upstream of the gas flow through the pump and thereby contaminate the semiconductor chamber to which it is attached.
The invention is concerned with overcoming such disadvantages and to provide a screw pump with improved power consumption coupled with improved lubricant containment.
SUMMARY OF THE INVENTION
In accordance with the invention, there is provided a vacuum pump incorporating a screw mechanism section and comprising two externally threaded rotors mounted on respective shafts in a pump body and adapted for counter-rotation in a first chamber within the pump body with intermeshing of the rotor threads to pump gas from a pump inlet by action of the rotors, wherein the root diameter of each rotor increases and the thread diameter of each rotor decreases in a direction from pump inlet and in which the gas is pumped, and wherein the rotors are positioned in the pump body by means of shaft bearings inside cavities in the rotors and sealed at the ends closest to the pump inlet.
Pumps of the invention provide the advantage that a volumetric compression is generated along the length of the screw mechanism (from chamber inlet to outlet) without the need to use end ports which are commonly used in air compressors. The purpose of such volumetric compression is to minimize the size of the exhaust stage of the screw section, thereby keeping the power consumption to a minimum whilst maintaining a good inlet size so as to allow faster evacuation of the chamber being pumped and faster inlet speeds of the gas being pumped. It also makes it easier for powders and other debris to be pumped without clogging the mechanism. In addition, the presence of bearings inside the rotors—the bores being typically half the length of the rotor—allows the inlet end of the tapered rotors to be machined to a greater depth (smaller diameter) than normal bearings would permit.
As such, the conjugate thread on the opposite rotor can therefore have a correspondingly larger diameter, all of which allow the pump inlet volume to be maximized.
In order for the pump to possess an increasing root diameter and a decreasing thread diameter in the screw section, the respective cavities or bores within the pump body—whose surfaces form the pump stator and which in cross se represented by a “figure of eight” configuration (see later)—will taper from the inlet to the outlet.
However it is clear that a decreasing thread diameter and an increasing root diameter causes the nominally annular spaces defined between successive threads of each rotor through which the gas being pumped passes in turn during operation of the pump to decrease from pump inlet to pump outlet. As such, gas passing through the pump will increasingly be compressed.
In addition, the external taper caused by the increasing root diameter of the rotors (from pump inlet to pump outlet) generally allows the cavities inside the rotors to be correspondingly tapered. In preferred embodiments, the invention allows, by virtue of the internal taper, for a sufficiently rigid bearing support structure to be present in the internal cavity. Such a bearing support can be made sufficiently rigid to resist bending stresses at the pump inlet end of the rotor/shaft arrangement.
In addition, the tapered rotor allows the bearing support structure to have a greater diameter and thickness at its driven end (the pump outlet end), reducing to a smaller diameter and thickness further along its length as it extends in to the bore in the tapered rotor.
The bearing supports for the internally positioned bearings may all be fixed to a head plate of the pump in the normal manner or, alternatively and preferably, may be fixed to the pump body independently of each other.
REFERENCES:
patent: 678570 (1901-07-01), Jones
patent: 3180559 (1965-04-01), Boyd
patent: 4405286 (1983-09-01), Studer
patent: 4952125 (1990-08-01), Nagai
patent: 4963079 (1990-10-01), Fujiwara et al.
patent: 6019586 (2000-02-01), Liou
patent: 384355 (1932-12-01), None
patent: 59-208077 (1984-11-01), None
patent: 0267384 (1989-10-01), None
North Michael Henry
Schofield Nigel Paul
Denion Thomas
Pace Salvatore P.
The BOC Group plc
Trieu Theresa
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