Pumps – Motor driven – Electric or magnetic motor
Reexamination Certificate
2011-03-01
2011-03-01
Kramer, Devon C (Department: 3746)
Pumps
Motor driven
Electric or magnetic motor
C137S565230
Reexamination Certificate
active
07896625
ABSTRACT:
A vacuum pumping system comprises a vacuum pumping arrangement comprising: a drive shaft; a motor for driving said drive shaft; a molecular pumping mechanism comprising a turbomolecular pumping mechanism; and a backing pumping mechanism. The drive shaft drives said molecular pumping mechanism and said backing pumping mechanism. The system also comprises an evacuation mechanism, such as a load lock pump, for evacuating at least, said turbomolecular pumping mechanism.
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Bobish Christopher
Edwards Limited
Kramer Devon C
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