Vacuum pumping system and method of controlling the same

Pumps – Processes

Reexamination Certificate

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Details

C417S302000, C118S050000, C137S565230

Reexamination Certificate

active

07101155

ABSTRACT:
A vacuum pump system (10; 36; 46) for pumping gas from an enclosure (12) comprises: a vacuum pump unit (14) having a pump inlet (16) connectable with an outlet (18) of such an enclosure and a pump outlet (20) for exhausting gas; and a chamber (22; 50) selectively connectable with the pump inlet and the pump outlet, such that, in use, in a first state gas can be pumped from the chamber to the pump inlet by the vacuum pump unit and in a second state gas can be evacuated from the pump outlet to the chamber to reduce pressure at the pump outlet.A method of controlling the vacuum pump system (10; 36; 46) comprises a first step of pumping gas from the chamber to the pump inlet using the vacuum pump unit and a second step of allowing gas to be evacuated from the pump outlet to the chamber to reduce pressure at the pump outlet.

REFERENCES:
patent: 5088895 (1992-02-01), Webb
patent: 5228838 (1993-07-01), Gebele et al.
patent: 5788825 (1998-08-01), Park et al.
patent: 6149729 (2000-11-01), Iwata et al.
patent: 6446651 (2002-09-01), Abbel
patent: 0343914 (1989-05-01), None
patent: 0510656 (1992-04-01), None
patent: 57161065 (1982-10-01), None
patent: 2001102281 (2001-04-01), None

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