Coating apparatus – Gas or vapor deposition
Reexamination Certificate
2005-06-27
2011-12-27
Gramaglia, Maureen (Department: 1716)
Coating apparatus
Gas or vapor deposition
C118S7230MW
Reexamination Certificate
active
08083854
ABSTRACT:
The invention relates to a vacuum pumping circuit comprising: an upper chamber (34) and a lower chamber (36) that communicate via a connecting orifice (38), and comprising a valve (40) provided with a stem guided so as to slide along a vertical axis (A1) in order to close the connecting orifice (38), which circuit is characterized in that the valve stem (48) is provided with a section forming a piston (52) which constitutes the mobile upper wall of a control chamber (54) communicating with the upper chamber (34), the piston (52) having an upper face (56) at atmospheric air pressure and a lower face (58) on which the pressure is that present in the control chamber (54).
REFERENCES:
patent: 3446422 (1969-05-01), Bailleul-Langlais et al.
patent: 4782886 (1988-11-01), Uchida et al.
patent: 6037562 (2000-03-01), Awakowicz et al.
patent: 6328805 (2001-12-01), Rius
patent: 6478043 (2002-11-01), Ishigaki
Gramaglia Maureen
Sidel Participations
Young & Thompson
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