Vacuum pump with gas heating

Details Vacuum pump with gas heating Vacuum pump with gas heating

1996-06-28

1999-03-09

Thorpe, Timothy S.

Pumps

With condition responsive pumped fluid control

Pumped fluid temperature responsive

4174231, 415 90, 415176, 415177, 415178, F04B 3906

Patent

active

058791396

ABSTRACT:
The inside of a vacuum pump is heated by means of a first heating unit to a temperature higher than the temperature at which products of reaction discharged from a process chamber are separated, and the inner surface of an exhaust pipe is heated to a temperature higher than the separation temperature by means of a second heating unit. If a vacuum process is carried out in the process chamber in this state, exhaust gas discharged from the process chamber can pass in a gaseous phase through the exhaust pipe and the vacuum pump without separating its unwanted by-products.

REFERENCES:
patent: 3164320 (1965-01-01), Welbourn
patent: 3506380 (1970-04-01), Powell
patent: 3981627 (1976-09-01), Kantor
patent: 4512725 (1985-04-01), Saulgeot
patent: 4904155 (1990-02-01), Nagaoka et al.
patent: 4929151 (1990-05-01), Long et al.
patent: 5062271 (1991-11-01), Okumura et al.
patent: 5443368 (1995-08-01), Weeks et al.
patent: 5513499 (1996-05-01), DeRijke
patent: 5618167 (1997-04-01), Hirakawa et al.
English Abstract for Japanese Laid-Open Patent Publication (KOKAI) No. 6-159287.

Affiliated with

Also associated with

Rating

Vacuum pump with gas heating does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vacuum pump with gas heating, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vacuum pump with gas heating will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1314189