Pumps – Diverse pumps – Including rotary nonexpansible chamber type
Reexamination Certificate
2006-04-25
2006-04-25
Freay, Charles G. (Department: 3746)
Pumps
Diverse pumps
Including rotary nonexpansible chamber type
C417S205000, C417S423400
Reexamination Certificate
active
07033142
ABSTRACT:
A vacuum pump system includes at least one high-vacuum pump, a fore-vacuum pump, and at least one intermediate pump, arranged between the at least one high-vacuum pump and the fore-vacuum pump and having its inlet connected directly and exclusively with the outlet of the high-vacuum pump.
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patent: 5733104 (1998-03-01), Conrad et al.
patent: 6030181 (2000-02-01), Conrad
patent: 6435811 (2002-08-01), Beyer et al.
Conrad Armin
Fahrenbach Peter
Mädler Matthias
Abelman ,Frayne & Schwab
Freay Charles G.
Pfeifer Vacuum GmbH
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