Vacuum pump system

Details Vacuum pump system Vacuum pump system

1995-08-17

1998-03-31

Thorpe, Timothy

Pumps

Condition responsive control of pump drive motor

By control of electric or magnetic drive motor

417202, 417250, 4174234, 4174255, F04B 2500

Patent

active

057331049

ABSTRACT:
A vacuum pump system for multi-stage gas inlet systems and including a pumping unit formed of a turbomolecular pump and one or several further pumps arranged downstream of the turbomolecular pump and the rotors of which are located on the same shaft as the rotor of the turbomolecular pump, and an additional intermittently operated dry running pump, which discharges against atmospheric pressure.

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A Conrad et al., Comparison of Holweck- and Gaede-pumping stages, Vacuum, vol. 44, Nos. 5-7, pp. 681 to 684/1993.

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