Pumps – Diverse pumps – Including rotary nonexpansible chamber type
Patent
1994-07-06
1995-08-29
Bertsch, Richard A.
Pumps
Diverse pumps
Including rotary nonexpansible chamber type
417248, 4174234, 415 90, F04C 2502
Patent
active
054455022
ABSTRACT:
A vacuum pump includes a positive displacement vacuum pump structure section disposed on a discharge opening side; a kinetic vacuum pump structure section, disposed on a suction opening side, for providing a high vacuum; and a kinetic vacuum pump structure section, disposed on a suction opening side, for providing a high pumping speed. The construction of the kinetic vacuum pump structure section is different from that of the kinetic vacuum pump structure section so as to differ relative thereto in one of ultimate pressure, pumping speed, and pumping speed of sucked gas with respect to a molecular weight of the sucked gas.
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Itou Daisuke
Maruyama Teruo
Bertsch Richard A.
Matsushita Electric - Industrial Co., Ltd.
McAndrews, Jr. Roland G.
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