Vacuum pump having lubrication and cooling systems

Pumps – Condition responsive control of pump drive motor – By control of electric or magnetic drive motor

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Details

417205, 4174234, F04B 4906

Patent

active

058367462

ABSTRACT:
A positive displacement vacuum pump, in which a plurality of rotors are driven into synchronous operation by independent motors, uses a rotational position sensor making use of the electromagnetic induction effect for obtaining rotational position information for the individual shafts. The rotational position sensor is cooled.

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patent: 5302089 (1994-04-01), Maruyama et al.
patent: 5314312 (1994-05-01), Ikemoto et al.
patent: 5348448 (1994-09-01), Ikemoto et al.
patent: 5354179 (1994-10-01), Maruyama et al.

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