Vacuum pump having different diameter rotors and a drive motor s

Details Vacuum pump having different diameter rotors and a drive motor s Vacuum pump having different diameter rotors and a drive motor s

1995-06-26

1998-07-21

Thorpe, Timothy

Pumps

Condition responsive control of pump drive motor

By control of electric or magnetic drive motor

4171992, 4174234, 4174235, F04B 4906, F04B 1700, F04B 3504

Patent

active

057826099

ABSTRACT:
A vacuum pump includes a plurality of rotors of different outer diameters accommodated in a housing so that a fluid transportation space is defined by the housing and the plural rotors. Rotary shafts are integrally formed with the respective rotors and a first motor, which is a high frequency motor, for driving the rotary shaft of the smaller diameter rotor as a driving shaft. A second motor, which is an AC servo motor or pulse motor, is provided for driving the other rotary shaft as a driven shaft. A rotation detecting device is provided adjacent each shaft for detecting rotating angles and/or rotating speeds of the first and second motors. Also provided is a fluid suction port and a fluid discharge port which are formed in the housing, and a control device for controlling rotation of the driven shaft based on data from the rotation detecting device so as to synchronize the rotation of the driven shaft driven by the second motor with that of the driving shaft driven by the first motor.

REFERENCES:
patent: 3724427 (1973-04-01), Sauder
patent: 4808077 (1989-02-01), Kan et al.
patent: 4850806 (1989-07-01), Morgan et al.
patent: 5197861 (1993-03-01), Maruyama et al.
patent: 5271719 (1993-12-01), Abe et al.
patent: 5348448 (1994-09-01), Ikemoto et al.
patent: 5354179 (1994-10-01), Maruyama et al.
patent: 5393201 (1995-02-01), Okutani et al.
patent: 5449276 (1995-09-01), Maruyama et al.

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