Vacuum pump having a rotor supported in the interior of its casi

Pumps – Motor driven – Axial thrust balancing means for rotary pump and motor

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Details

308 10, 415 90, 415101, 415107, 417423R, F04B 1700

Patent

active

040573699

ABSTRACT:
The present invention relates to magnetic support of the rotor structure in vacuum pumps, particularly turbomolecular pumps. This magnetic support eliminates the requirements for bearing lubricants, and the consequent degradation of the vacuum to be produced by lubricant vapors.

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patent: 3771909 (1973-11-01), Rousseau et al.
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patent: 3823990 (1974-07-01), Gilinson

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