Vacuum pump for producing a clean molecular vacuum

Details Vacuum pump for producing a clean molecular vacuum Vacuum pump for producing a clean molecular vacuum

1991-03-05

1992-04-21

Bertsch, Richard A.

Pumps

Motor driven

Motor within rotary pumping member

4174234, 4174237, 41742312, 310 905, F04B 1700, F04B 3504

Patent

active

051062739

ABSTRACT:
A vacuum pump for producing a clean molecular vacuum, the vacuum pump comprising a stator (1A, 1B) and a rotor (2), the rotor being driven by a drive motor (6, 7, 8) integrated in the pump, the rotor being supported by magnetic bearings, and being bell-shaped fitting over an internal projection (3) protruding from the stator, the stator components (7, 8) of the drive motor and of the bearings (11B, 12B, 13B, 15, 16) being situated on the periphery of the internal projection (3), the rotor components (11A, 12A, 13A, 14) of the drive motor and of the bearings being situated on the internal periphery of the bell-shaped rotor (2), the vacuum pump being characterized in that a first gastight coating (29) made of non-magnetic material covers the projection (3) overlying the stator components of the motor and of the bearings, and in that similarly in the rotor a second gastight coating (30) made of non-magnetic material covers the rotor components of the drive motor and of the bearings.

REFERENCES:
patent: 4036565 (1977-07-01), Becker
patent: 4337981 (1982-07-01), Meinke
patent: 4500142 (1985-02-01), Brunet
patent: 4563046 (1986-01-01), Shimamoto
patent: 4717315 (1988-01-01), Miki et al.
patent: 4787829 (1988-11-01), Miyazaki et al.
patent: 4812694 (1989-03-01), Fremery
patent: 4878813 (1989-11-01), Miki

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