Vacuum pump filter for use in a semiconductor system

Details Vacuum pump filter for use in a semiconductor system Vacuum pump filter for use in a semiconductor system

1997-01-14

1998-07-07

Smith, Duane S.

Gas separation

Combined or convertible

55485, 55487, 55503, 55DIG6, B01D 4600

Patent

active

057762163

ABSTRACT:
A vacuum pump filter for filtering debris from a semiconductor system is disclosed. The vacuum pump filter includes an inlet port for connecting to a chamber. A first filter holder is connected to the inlet port for filtering large debris. A second filter holder for filtering middle debris is connected to the first filter holder. A third filter holder is connected to the second filter holder for filtering small debris. A outlet port is connected to the third filter holder via a terminal. The other terminal of the outlet port is connected to a pump system.

REFERENCES:
patent: 2400719 (1946-05-01), Stackhouse
patent: 2952331 (1960-09-01), Beach
patent: 3386580 (1968-06-01), Grabarczyk
patent: 3422679 (1969-01-01), McGowan et al .
patent: 3557536 (1971-01-01), Ririe
patent: 3898063 (1975-08-01), Gazan
patent: 5375293 (1994-12-01), Gilbertson
patent: 5536286 (1996-07-01), Freeman

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