Vacuum pump damping adapter

Refrigeration – Low pressure cold trap process and apparatus

Reexamination Certificate

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Details

C062S295000

Reexamination Certificate

active

07854128

ABSTRACT:
The invention concerns a damping adapter (3) insertable in a suction duct between a service chamber (2) and a vacuum pump (1). The adapter (3) consists of a tubular duct wall (6) in the form of a flexible bellows surrounded by a damping sleeve (7) supported on two end flanges (4, 5). The flexible bellows' plys (6a, 6b) receive a passive damping elastomer (8a) on their outer faces, engaged between the successive plys (6a, 6b). This considerably reduces the transmitting of vibrations from the vacuum pump (1) to the service chamber (2), enabling applications in the microscopy field in particular.

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patent: WO 02/086325 (2002-10-01), None

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