Vacuum pump control system

Details Vacuum pump control system Vacuum pump control system

1997-05-19

1999-10-26

Freay, Charles G.

Pumps

Condition responsive control of pump drive motor

Plural pumps having separate drive motors, supply sources,...

F04B 4106

Patent

active

059717114

ABSTRACT:
A vacuum pump control system is used for controlling a plurality of vacuum pumps comprising at least one type of cryopump, turbomolecular pump, cryoturbo pump, and dry pump such as a Roots type vacuum pump. The vacuum pump control system for controlling a plurality of vacuum pumps, comprises a host computer; a plurality of vacuum pump controllers connected respectively to said vacuum pumps; and a network control unit for transmitting information between the host computer and the vacuum pump controllers. The vacuum pump controllers are connected in parallel to the network control unit by respective communication lines.

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patent: 5586050 (1996-12-01), Makel et al.
patent: 5746581 (1998-05-01), Okumura et al.

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