Vacuum pump apparatus having peltier elements for cooling the mo

Details Vacuum pump apparatus having peltier elements for cooling the mo Vacuum pump apparatus having peltier elements for cooling the mo

1995-06-06

1997-04-08

Thorpe, Timothy

Pumps

Motor driven

Interrelated or common lubricating or cooling means for pump...

4174234, 4174238, 415 90, 415178, F04B 1700

Patent

active

056181671

ABSTRACT:
A vacuum pumping apparatus is presented having a Peltier element based device to provide a dual role of cooling for bearings/drive-motor and heating for sections prone to depositing reaction products. A housing (7) having the bearing and motor sections is provided with a Peltier element based device (20) to absorb the waste heat generated in the bearings and the drive motor, and transfer the waste heat to another section (17) of the apparatus to be released. The released heat may be used to heat that section of the device to facilitate vacuum processing, wherein reaction products are prone to sublime and deposit.

REFERENCES:
patent: 3761197 (1973-09-01), Kelly
patent: 4744220 (1988-05-01), Kerner et al.
patent: 4929151 (1990-05-01), Long et al.
patent: 5180293 (1993-01-01), Hartl
patent: 5315830 (1994-05-01), Doke et al.
patent: 5350275 (1994-09-01), Ishimaru
patent: 5423479 (1995-06-01), Nichols
patent: 5465581 (1995-11-01), Haertl et al.

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