Vacuum pump apparatus and shaft sealing device therefor

Rotary expansible chamber devices – With mechanical sealing

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Details

418DIG1, F04C 1818, F04C 2700

Patent

active

049939300

ABSTRACT:
A vacuum pump apparatus comprises a male and female screw rotors meshing with each other, a casing for accommodating the male and female screw rotors and having a working space, a suction port and a discharge port both communicating with the working space, bearing portions for supporting shafts of the male and female screw rotors on the suction and discharge sides thereof. Shaft seal portions which are respectively disposed between the working space and each of the bearing portions and are adapted to seal the shafts of the male and female screw rotors on the suction and discharge sides thereof. Seal gas introducing device introduces seal gas into the shaft seal portions, and a controller controls the pressure of the seal gas introduced into the shaft seal portions.

REFERENCES:
patent: 4465442 (1984-08-01), Lang et al.
patent: 4770615 (1988-09-01), Fujiwara et al.
patent: 4781553 (1988-11-01), Nomura et al.
patent: 4797068 (1989-01-01), Hayakawa et al.

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