Vacuum pump apparatus

Refrigeration – Low pressure cold trap process and apparatus

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Details

55269, 62100, 62268, 417901, F17C 702

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active

045597871

ABSTRACT:
An improved cryopumping apparatus which comprises a cryopumping space which may be alternately opened and closed from the surrounding area by moveable panels, trubular cryopanels within said cryopumping space through which a coolant such as liquid helium may be passed, and an apparatus for spraying liquid argon onto said cylindrical cryopanels in order to enhance the cryogenic entrapment of such low-z ions, atoms, and molecules as hydrogen and helium.

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