Electricity: motive power systems – Automatic and/or with time-delay means – Responsive to thermal conditions
Reexamination Certificate
2006-11-30
2008-08-26
Ro, Bentsu (Department: 2837)
Electricity: motive power systems
Automatic and/or with time-delay means
Responsive to thermal conditions
C417S032000, C417S423400
Reexamination Certificate
active
07417398
ABSTRACT:
A vacuum pump includes at least one magnetic body located on a circle about a rotor rotational axis and having a Curie temperature within a rotor temperature monitoring range; an inductance detecting portion facing the circle so as to establish a gap between the circle and the inductance detecting portion, for detecting a change of magnetic permeability of the magnetic body as an inductance change when the magnetic body rotates; and a carrier generation device generating a carrier signal for providing in the inductance detecting portion. An A/D conversion device samples a detection signal of the inductance detecting portion synchronously with a carrier generation by the carrier generation device, and converts the detection signal to a digital signal. A determination device determines whether or not a temperature of the rotor exceeds a predetermined temperature, based on the change of the magnetic permeability of the magnetic body.
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Arakawa Akira
Kozaki Junichiro
Ohfuji Masaki
Tsunazawa Yoshio
Kanesaka Manabu
Ro Bentsu
Shimadzu Corporation
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