Vacuum pump

Details Vacuum pump Vacuum pump

2006-01-31

2006-01-31

Koczo, Jr., Michael (Department: 3746)

Pumps

Motor driven

Electric or magnetic motor

Reexamination Certificate

active

06991439

ABSTRACT:
A vacuum pump apparatus has a casing and a base connected to the casing. The base has an opening communicating with an interior space of the casing. A heater is mounted on the base for heating the base to maintain a gas discharge path at a temperature high enough to prevent solidification of processed gas in the vacuum pump. A cover member covers the opening of the base. The cover member has a first surface communicating with the interior space of the casing and a second surface exposed to the exterior of the vacuum pump. A substrate is connected to the first surface of the cover member and has at least one circuit for controlling operation of the vacuum pump.

REFERENCES:
patent: 5971725 (1999-10-01), de Simon et al.
patent: 6644938 (2003-11-01), Omori

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