Vacuum pump

Rotary kinetic fluid motors or pumps – Including heat insulation or exchange means

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Details

415 90, F01D 508

Patent

active

049291513

ABSTRACT:
A molecular or turbomolecular type of pump comprising a stator (2) and a rotor (3) rotated by a motor (7), the stator having a first zone overlying the rotor and in which gas is admitted, and a second zone adjacent to the drive motor and cooled by a flow of fluid (8), the pump being characterized in that the first zone is provided with heater (12) for maintaining the temperature of the first zone above the condensation threshold of the gas being admitted, with the first and second zones being separated from each other by a thermal impedance element (13).

REFERENCES:
patent: 4797062 (1989-01-01), Deters et al.
patent: 4804313 (1989-02-01), Nasvytis
European Patent No. 197,238, Nov. 1986.

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