Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Reexamination Certificate
2005-01-11
2005-01-11
Look, Edward K. (Department: 3745)
Rotary kinetic fluid motors or pumps
Smooth runner surface for working fluid frictional contact
C415S119000
Reexamination Certificate
active
06840736
ABSTRACT:
Vibrations generated by a vacuum pump are prevented from propagating to external equipment such as an electron microscope. A casing (a separate casing portion and a casing main body) that houses a stator, stator blades, a rotor portion, and rotor blades as an exhaust function portion is connected to an inlet port portion in which an inlet port for sucking in a gas from the outside is formed, through an elastic member. An suction space between the casing and the inlet port portion is sealed by a bellows cylinder sealing means, and motion regulating members and motion regulating members and which regulate the amount of separation between the inlet port portion and the casing, and change shape due to relative motion between the two, are formed between the inlet port portion and the casing. The elastic member can maintain an appropriate amount of elastic force by means of the motion regulating members, good vibration reducing characteristics can be obtained at all times, and the propagation of vibrations to external equipment and the like, causing loss of function and endurance of the equipment, can be prevented. Further, plastic deformation and breakage of the elastic member and the sealing member can be prevented, and in addition, the vacuum pump can be prevented from running wild due to a sudden accident.
REFERENCES:
patent: 4541772 (1985-09-01), Becker
patent: 4926648 (1990-05-01), Okumura et al.
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Ishikawa Takaharu
Namiki Hirotaka
Ohtachi Yoshinobu
Yamauchi Akira
Adams & Wilks
BOC Edwards Technologies Limited
Edgar Richard A.
Look Edward K.
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