Vacuum pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact

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Details

415175, 415178, F04D 2958

Patent

active

051904381

ABSTRACT:
A vacuum pump of the present invention comprises a housing including a suction port and an exhaust port, a stator fixed in the housing, a rotor rotatably supported in the housing, and a cooling jacket provided adjacent to the stator. Gas suctioned from the suction port and having a pressure substantially equal to or close to the atmospheric pressure is exhausted from the exhaust port. A cooling fluid having a thermal conductivity less than that of water, for example, of 0.08 to 0.25 Kcal/m.h..degree.C. flows through the cooling jacket. When the gas contains aluminum chloride, the cooling fluid flows into the cooling jacket in such a manner that the temperature inside a gas conduit is maintained to be higher than the sublimation temperature of aluminum chloride. Lubrication oil may be supplied as the cooling fluid to the cooling jacket from the same supply line as lubrication oil supplied to oil lubricating bearings provided below a pump mechanism unit. A closed-loop line may be comprised of the cooling jacket, a tank, the supply line, and a return line, to thereby circulate the cooling fluid by a pump.

REFERENCES:
patent: 3324970 (1967-06-01), McHugh
patent: 3536418 (1970-10-01), Breaux
patent: 4283167 (1981-08-01), Bassam et al.
patent: 4668160 (1987-05-01), Mase et al.
patent: 4734018 (1988-03-01), Taniyama et al.
patent: 4904155 (1990-02-01), Nagaoka et al.
patent: 4929151 (1990-05-01), Long et al.

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