Electricity: motive power systems – Automatic and/or with time-delay means – Responsive to thermal conditions
Reexamination Certificate
2011-06-21
2011-06-21
Ro, Bentsu (Department: 2837)
Electricity: motive power systems
Automatic and/or with time-delay means
Responsive to thermal conditions
C417S032000, C374S128000, C374S129000
Reexamination Certificate
active
07965054
ABSTRACT:
A vacuum pump capable of accurately detecting a rotor temperature based on a change in permeability of a magnetic material. Two targets are fixed to a nut opposed to a gap sensor. The nut is made of pure iron, and a surface of the nut opposed to the gap sensor serves as a target. The target has a Curie temperature greater than a temperature monitoring range, and each of the targets has a Curie temperature falling within the temperature monitoring range. When the targets become opposed to the gap sensor in turn according to rotation of a rotor, three types of signals are output from the gap sensor. The difference-signal generation means generates a difference signal of each the targets, on the basis of a signal of the target. The difference signal is compared with a reference signal V0for detecting the Curie temperatures to detect a rotor temperature.
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Arakawa Akira
Kozaki Junichiro
Ohfuji Masaki
Tsunazawa Yoshio
Ro Bentsu
Shimadzu Corporation
Sughrue & Mion, PLLC
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