Vacuum pump

Details Vacuum pump Vacuum pump

1988-03-09

1989-11-07

Croyle, Carlton R.

Pumps

Condition responsive control of pump drive motor

Plural pumps having separate drive motors, supply sources,...

417247, 4174234, 415 90, F04B 2304, F04B 3714

Patent

active

048788139

ABSTRACT:
A vacuum pump producing ultra high vacua has a housing containing a first set of rotor blades provided around a first rotor for producing ultra high vacua and a second set of rotor blades provided around a second rotor for producing low to high vacua wherein the first rotor and the second rotor are magnetically suspended during pump operation. The first rotor is disconnected from the second rotor during pump operation in a low to high vacuum range, and it is connected with the second rotor as the pump operation shifts from a high vacuum range to an ultra high vacuum range. Because of this feature, the pump operation ranging from a low vacuum range up to an ultra high vacuum range can be performed by a single pump.

REFERENCES:
patent: 4579508 (1986-04-01), Tsumaki et al.
patent: 4609332 (1986-09-01), Miki et al.
patent: 4655678 (1987-04-01), Miki
patent: 4717315 (1988-01-01), Miki et al.
patent: 4732529 (1988-03-01), Narita et al.
patent: 4734018 (1988-03-01), Taniyama et al.
Soviet Inventions Illustrated, Week 8401, Section P/Q, Abstract No. 84-004833/01, Derwent Publications Ltd, London, GB; & SU-A-1 000 602 (Bashkir Oil Ind.) 05-03-1983.

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