Vacuum pump

Details Vacuum pump Vacuum pump

1974-08-01

1976-07-13

Husar, C. J.

Pumps

Successive stages

415 90, 415100, 417405, 250311, F04D 1904

Patent

active

039690393

ABSTRACT:
An integral vacuum pump for producing ultra-high vacuums including, in combination, axial turbomolecular, centrifugal compressor and vortex diode pumping means.

REFERENCES:
patent: 3399827 (1968-09-01), Schwartzman
patent: 3536418 (1970-10-01), Breaux
patent: 3628894 (1971-12-01), Ferguson, Jr.
patent: 3644051 (1972-02-01), Shapiro
patent: 3666374 (1972-05-01), Becker
patent: 3668393 (1972-06-01), Rauch
patent: 3696246 (1972-10-01), Buchanan
patent: 3759626 (1973-09-01), Becker

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