Vacuum pump

Details Vacuum pump Vacuum pump

1991-10-01

1993-06-15

Look, Edward K.

Rotary kinetic fluid motors or pumps

With means for re-entry of working fluid to blade set

Turbine regenerative pump

415 90, F01D 112, F01D 136

Patent

active

052192695

ABSTRACT:
A vacuum pump includes a casing provided with an inlet port and an outlet port; a turbo molecular pump unit disposed in an uppermost section, with respect to a flow direction of the gas, of the casing; a peripheral groove vacuum pump unit disposed in a middle section of the casing; and a vortex vacuum pump unit disposed in a lowermost section, with respect to the flow direction of the gas, of the casing.

REFERENCES:
patent: 1069408 (1913-08-01), Gaede
patent: 2396319 (1946-03-01), Edwards et al.
patent: 2684034 (1954-07-01), Roth
patent: 2684034 (1954-07-01), Roth
patent: 2842062 (1958-07-01), Wright
patent: 3283844 (1992-05-01), Brady, Jr.
patent: 3915589 (1975-10-01), Vander Linden
patent: 4141674 (1979-02-01), Schonwald
patent: 4325672 (1982-04-01), Sixsmith et al.
patent: 4478550 (1984-10-01), Watanabe et al.
patent: 4668160 (1987-05-01), Mase et al.
patent: 4673333 (1987-06-01), Kluge

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