Vacuum pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact

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Details

415143, F01D 136

Patent

active

056649355

ABSTRACT:
A dry turbo vacuum pump has a multistage circumferential impeller supported on a shaft, and a stator which cooperates with it to form a multistage peripheral flow pump. A centrifugal pump arranged at an inlet side of the peripheral flow pump is also mounted on the same shaft, so that gas sucked from the inlet is discharged to the atmosphere from the peripheral flow pump. The multistage peripheral flow pump and at least one stage of the centrifugal pump are integrated.

REFERENCES:
patent: 4390317 (1983-06-01), Lehmann et al.
patent: 4726734 (1988-02-01), Zientek et al.
patent: 4747749 (1988-05-01), Sagnes
patent: 4808067 (1989-02-01), Saulgeot
patent: 5051060 (1991-09-01), Fleishmann et al.
patent: 5059092 (1991-10-01), Kabelitz et al.
patent: 5536148 (1996-07-01), Nishiuchi et al.
patent: 5553998 (1996-09-01), Muhlhoff et al.

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