Package making – Methods – With contents treating
Patent
1993-05-18
1995-03-21
Coan, James F.
Package making
Methods
With contents treating
53 90, 53405, 53510, H01L 2100, B65B 4905
Patent
active
053984811
ABSTRACT:
Several vacuum process steps are applied to substrates such as a wafer using a vacuum container for storing and transporting the substrates under vacuum. The vacuum container comprises a container body having a main opening for inserting a substrate and taking out the substrate, a lid engageable with the container body for closing and sealing the main opening of the container body, and a gate provided on one of the container body and the lid for performing at least one of evacuating an interior of the vacuum container and raising the pressure of the interior of the vacuum container to ambient.
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European Search Report, dated Aug. 24, 1993.
Kajiyama Masaaki
Kondo Fumio
Matsumura Masao
Takeuchi Noriyuki
Yoshioka Takeshi
Coan James F.
Ebara Corporation
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