Vacuum processing apparatus with low particle generating vacuum

Details Vacuum processing apparatus with low particle generating vacuum Vacuum processing apparatus with low particle generating vacuum

1997-04-08

2000-03-07

Stodola, Daniel P.

Movable or removable closures

Closure seal; e.g., striker gasket or weatherstrip

137 1, E06B 716

Patent

active

060324198

ABSTRACT:
A wafer processing apparatus is provided with sealing ports between adjacent evacuatable chambers that are actuated to compress elastomeric seals carried by the valve sealing elements to differing degrees of compression, based on the amount of pressure differential between the chambers when sealed. The degree of compression is controlled so that less compression of the seal takes place when less is required to seal, such as with lower pressure differentials, thereby avoiding unnecessary fatigue and wear of and around the seals that would otherwise increase the generation of particulate contamination.

REFERENCES:
patent: 3977423 (1976-08-01), Clayton
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patent: 4991619 (1991-02-01), Della Porta
patent: 5205051 (1993-04-01), Hurwitt
patent: 5226632 (1993-07-01), Tepman et al.
patent: 5237756 (1993-08-01), Hurwitt
patent: 5363872 (1994-11-01), Lorimer
patent: 5589041 (1996-12-01), Lantsman

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